METROLOGY, INSPECTION, AND PROCESS CONTROL FOR MICROLITHOGRAPHY XXIII

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043528

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Title: Metrology, Inspection, and Process Control for Microlithography XXIII
Subtitle: At SPIE Advanced Lithography
Date/Location: Held 23-26 February 2009, San Jose, California, USA.
Series: Proceedings of SPIE Volume 7272
Editor: Allgair, John A.
ISBN: 9780819475251
Pages: 1,300 (2 Vols) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Apr 2009 )

Title: Metrology, Inspection, and Process Control for Microlithography XXIII
Subtitle: At SPIE Advanced Lithography
Date/Location: Held 23-26 February 2009, San Jose, California, USA.
Series: Proceedings of SPIE Volume 7272
Editor: Allgair, John A.
ISBN: 9780819475251
Pages: 1,300 (2 Vols) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Apr 2009 )