MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XIV

MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XIV

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  • Title: Micromachining and Microfabrication Process Technology XIV
  • Subtitle: At SPIE MOEMS-MEMS: Micro- and Nanofabrication
  • Date/Location: Held 27 January 2009, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7204
  • Editor: Maher, Mary Ann
  • ISBN: 9780819474506
  • Pages: 144 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Feb 2009 )

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  • Title: Micromachining and Microfabrication Process Technology XIV
  • Subtitle: At SPIE MOEMS-MEMS: Micro- and Nanofabrication
  • Date/Location: Held 27 January 2009, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 7204
  • Editor: Maher, Mary Ann
  • ISBN: 9780819474506
  • Pages: 144 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Feb 2009 )