OPTICAL MICRO- AND NANOMETROLOGY IN MICROSYSTEMS TECHNOLOGY II

OPTICAL MICRO- AND NANOMETROLOGY IN MICROSYSTEMS TECHNOLOGY II

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043253
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Details

  • Title: Optical Micro- and Nanometrology in Microsystems Technology II
  • Subtitle: At SPIE Photonics Europe
  • Date/Location: Held 8-10 April 2008, Strasbourg, France.
  • Series: Proceedings of SPIE Volume 6995
  • Editor: Gorecki, Christophe
  • ISBN: 9780819471932
  • Pages: 368 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jun 2008 )

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Tab 4

 
  • Title: Optical Micro- and Nanometrology in Microsystems Technology II
  • Subtitle: At SPIE Photonics Europe
  • Date/Location: Held 8-10 April 2008, Strasbourg, France.
  • Series: Proceedings of SPIE Volume 6995
  • Editor: Gorecki, Christophe
  • ISBN: 9780819471932
  • Pages: 368 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jun 2008 )