DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION II

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043183
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  • Title: Design for Manufacturability through Design-Process Integration II
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 28-29 February 2008, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6925
  • Editor: Singh, Vivek K.
  • ISBN: 9780819471109
  • Pages: 548 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2008 )

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  • Title: Design for Manufacturability through Design-Process Integration II
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 28-29 February 2008, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6925
  • Editor: Singh, Vivek K.
  • ISBN: 9780819471109
  • Pages: 548 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2008 )