ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXV

ADVANCES IN RESIST MATERIALS AND PROCESSING TECHNOLOGY XXV

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043181
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  • Title: Advances in Resist Materials and Processing Technology XXV
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 25-27 February 2008, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6923
  • Editor: Henderson, Clifford L.
  • ISBN: 9780819471086
  • Pages: 1,310 (2 Vols) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2008 )

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  • Title: Advances in Resist Materials and Processing Technology XXV
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 25-27 February 2008, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6923
  • Editor: Henderson, Clifford L.
  • ISBN: 9780819471086
  • Pages: 1,310 (2 Vols) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2008 )