EMERGING LITHOGRAPHIC TECHNOLOGIES XII

EMERGING LITHOGRAPHIC TECHNOLOGIES XII

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043179
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Details

  • Title: Emerging Lithographic Technologies XII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 26-28 February 2008, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6921
  • Editor: Schellenberg, Frank M.
  • ISBN: 9780819471062
  • Pages: 1,144 (2 Vols) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2008 )

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  • Title: Emerging Lithographic Technologies XII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 26-28 February 2008, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6921
  • Editor: Schellenberg, Frank M.
  • ISBN: 9780819471062
  • Pages: 1,144 (2 Vols) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2008 )