MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS V. SPECIAL FOCUS TOPICS: TRANSDUCERS AT THE MICRO-NANO INTERFACE

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043143

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Title: MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface
Subtitle: At MOEMS-MEMS 2008 Micro and Nanofabrication
Date/Location: Held 21-22 January 2008, San Jose, California, USA.
Series: Proceedings of SPIE Volume 6885
Editor: Tadigadapa, Srinivas A.
ISBN: 9780819470607
Pages: 136 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Feb 2008 )

Title: MEMS/MOEMS Components and Their Applications V. Special Focus Topics: Transducers at the Micro-Nano Interface
Subtitle: At MOEMS-MEMS 2008 Micro and Nanofabrication
Date/Location: Held 21-22 January 2008, San Jose, California, USA.
Series: Proceedings of SPIE Volume 6885
Editor: Tadigadapa, Srinivas A.
ISBN: 9780819470607
Pages: 136 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Feb 2008 )