RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS VII

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043142

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Title: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
Subtitle: At MOEMS-MEMS 2008 Micro and Nanofabrication
Date/Location: Held 21-22 January 2008, San Jose, California, USA.
Series: Proceedings of SPIE Volume 6884
Editor: Hartzell, Allyson
ISBN: 9780819470591
Pages: 268 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Feb 2008 )

Title: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
Subtitle: At MOEMS-MEMS 2008 Micro and Nanofabrication
Date/Location: Held 21-22 January 2008, San Jose, California, USA.
Series: Proceedings of SPIE Volume 6884
Editor: Hartzell, Allyson
ISBN: 9780819470591
Pages: 268 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Feb 2008 )