MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XIII

MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY XIII

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043140
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  • Title: Micromachining and Microfabrication Process Technology XIII
  • Subtitle: At MOEMS-MEMS 2008 Micro and Nanofabrication
  • Date/Location: Held 22-23 January 2008, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6882
  • Editor: Maher, Mary Ann
  • ISBN: 9780819470577
  • Pages: 150 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Feb 2008 )

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Tab 4

 
  • Title: Micromachining and Microfabrication Process Technology XIII
  • Subtitle: At MOEMS-MEMS 2008 Micro and Nanofabrication
  • Date/Location: Held 22-23 January 2008, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6882
  • Editor: Maher, Mary Ann
  • ISBN: 9780819470577
  • Pages: 150 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Feb 2008 )