DEVICE AND PROCESS TECHNOLOGIES FOR MICROELECTRONICS, MEMS, PHOTONICS, AND NANOTECHNOLOGY IV

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043058

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Title: Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Subtitle: At SPIE Microelectronics, MEMS, and Nanotechnology
Date/Location: Held 5-7 December 2007, Canberra, ACT, Australia.
Series: Proceedings of SPIE Volume 6800
Editor: Tan, Hark Hoe
ISBN: 9780819469717
Pages: 478 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Dec 2007 )

Title: Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
Subtitle: At SPIE Microelectronics, MEMS, and Nanotechnology
Date/Location: Held 5-7 December 2007, Canberra, ACT, Australia.
Series: Proceedings of SPIE Volume 6800
Editor: Tan, Hark Hoe
ISBN: 9780819469717
Pages: 478 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Dec 2007 )