24TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

24TH EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

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043050
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Details

  • Title: 24th European Mask and Lithography Conference
  • Date/Location: Held 21-24 January 2008, Dresden, Germany.
  • Series: Proceedings of SPIE Volume 6792
  • Editor: Behringer, Uwe F.W.
  • ISBN: 9780819469564
  • Pages: 432 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2008 )

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Tab 4

 
  • Title: 24th European Mask and Lithography Conference
  • Date/Location: Held 21-24 January 2008, Dresden, Germany.
  • Series: Proceedings of SPIE Volume 6792
  • Editor: Behringer, Uwe F.W.
  • ISBN: 9780819469564
  • Pages: 432 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Apr 2008 )