MODELING ASPECTS IN OPTICAL METROLOGY

MODELING ASPECTS IN OPTICAL METROLOGY

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042881
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  • Title: Modeling Aspects in Optical Metrology
  • Subtitle: At Optical Metrology
  • Date/Location: Held 18-19 June 2007, Munich, Germany.
  • Series: Proceedings of SPIE Volume 6617
  • Editor: Bosse, Harald
  • ISBN: 9780819467591
  • Pages: 424 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jun 2007 )

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  • Title: Modeling Aspects in Optical Metrology
  • Subtitle: At Optical Metrology
  • Date/Location: Held 18-19 June 2007, Munich, Germany.
  • Series: Proceedings of SPIE Volume 6617
  • Editor: Bosse, Harald
  • ISBN: 9780819467591
  • Pages: 424 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jun 2007 )