SMART SENSORS, ACTUATORS, AND MEMS III

SMART SENSORS, ACTUATORS, AND MEMS III

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042870
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Details

  • Title: Smart Sensors, Actuators, and MEMS III
  • Subtitle: At Microtechnologies for the New Millennium
  • Date/Location: Held 2-4 May 2007, Maspalomas, Gran Canaria, Spain.
  • Series: Proceedings of SPIE Volume 6589
  • Editor: Becker, Thomas
  • ISBN: 9780819467171
  • Pages: 536 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2007 )

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Tab 4

 
  • Title: Smart Sensors, Actuators, and MEMS III
  • Subtitle: At Microtechnologies for the New Millennium
  • Date/Location: Held 2-4 May 2007, Maspalomas, Gran Canaria, Spain.
  • Series: Proceedings of SPIE Volume 6589
  • Editor: Becker, Thomas
  • ISBN: 9780819467171
  • Pages: 536 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2007 )