DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION

DESIGN FOR MANUFACTURABILITY THROUGH DESIGN-PROCESS INTEGRATION

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042808
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Details

  • Title: Design for Manufacturability through Design-Process Integration
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 28 February - 2 March 2007, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6521
  • Editor: Wong, Alfred K. K.
  • ISBN: 9780819466402
  • Pages: 588 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2007 )

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Tab 4

 
  • Title: Design for Manufacturability through Design-Process Integration
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 28 February - 2 March 2007, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6521
  • Editor: Wong, Alfred K. K.
  • ISBN: 9780819466402
  • Pages: 588 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2007 )