EMERGING LITHOGRAPHIC TECHNOLOGIES XI

EMERGING LITHOGRAPHIC TECHNOLOGIES XI

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042804
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Details

  • Title: Emerging Lithographic Technologies XI
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 27 February - 1 March 2007, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6517
  • Editor: Lercel, Michael J.
  • ISBN: 9780819466365
  • Pages: 1,124 (2 Vols) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2007 )

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  • Title: Emerging Lithographic Technologies XI
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 27 February - 1 March 2007, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6517
  • Editor: Lercel, Michael J.
  • ISBN: 9780819466365
  • Pages: 1,124 (2 Vols) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Mar 2007 )