MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS IV

MEMS/MOEMS COMPONENTS AND THEIR APPLICATIONS IV

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042751
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  • Title: MEMS/MOEMS Components and Their Applications IV
  • Subtitle: At MOEMS-MEMS 2007 Micro and Nanofabrication
  • Date/Location: Held 22-23 January 2007, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6464
  • Editor: Tadigadapa, Srinivas A.
  • ISBN: 9780819465771
  • Pages: 202 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Feb 2007 )

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  • Title: MEMS/MOEMS Components and Their Applications IV
  • Subtitle: At MOEMS-MEMS 2007 Micro and Nanofabrication
  • Date/Location: Held 22-23 January 2007, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 6464
  • Editor: Tadigadapa, Srinivas A.
  • ISBN: 9780819465771
  • Pages: 202 (1 Vol) (approx)
  • Format: Softcover
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Feb 2007 )