RELIABILITY, PACKAGING, TESTING, AND CHARACTERIZATION OF MEMS/MOEMS VI

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042750

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Title: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
Subtitle: At MOEMS-MEMS 2007 Micro and Nanofabrication
Date/Location: Held 23-24 January 2007, San Jose, California, USA.
Series: Proceedings of SPIE Volume 6463
Editor: Hartzell, Allyson
ISBN: 9780819465764
Pages: 246 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Jan 2007 )

Title: Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
Subtitle: At MOEMS-MEMS 2007 Micro and Nanofabrication
Date/Location: Held 23-24 January 2007, San Jose, California, USA.
Series: Proceedings of SPIE Volume 6463
Editor: Hartzell, Allyson
ISBN: 9780819465764
Pages: 246 (1 Vol) (approx)
Format: Softcover
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Jan 2007 )