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MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS V AND MICROFABRICATION PROCESS TECHNOLOGY XII
- Item #:
- 042749
- UPC:
Details
-
Title:
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
-
Subtitle:
At MOEMS-MEMS 2007 Micro and Nanofabrication
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Date/Location:
Held 22-24 January 2007, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 6462
-
Editor:
Maher, Mary Ann
-
ISBN:
9780819465757
-
Pages:
370 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Feb 2007 )
-
Title:
Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
-
Subtitle:
At MOEMS-MEMS 2007 Micro and Nanofabrication
-
Date/Location:
Held 22-24 January 2007, San Jose, California, USA.
-
Series:
Proceedings of SPIE Volume 6462
-
Editor:
Maher, Mary Ann
-
ISBN:
9780819465757
-
Pages:
370 (1 Vol) (approx)
-
Format:
Softcover
-
Publisher:
SPIE - International Society for Optics and Photonics
-
POD Publisher:
Curran Associates, Inc. ( Feb 2007 )