Details
- Title: 16th International Symposium on Semiconductor Cleaning Science and Technology ((SCST 16)
- Subtitle: 236th ECS Meeting
- Date/Location: Held 13-17 October 2019, Atlanta, Georgia, USA.
- Series: ECS Transactions Volume 92 No.02
- Editor: Saga, K. et al.
- ISBN: 9781510895881
- Pages: 274 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Nov 2019 )
Description
Members/Attendees
Tab 4
- Title: 16th International Symposium on Semiconductor Cleaning Science and Technology ((SCST 16)
- Subtitle: 236th ECS Meeting
- Date/Location: Held 13-17 October 2019, Atlanta, Georgia, USA.
- Series: ECS Transactions Volume 92 No.02
- Editor: Saga, K. et al.
- ISBN: 9781510895881
- Pages: 274 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Nov 2019 )