Details
- Title: Electrochemical Processing in ULSI and MEMS 4
- Subtitle: 215th ECS Meeting
- Date/Location: Held 24-29 May 2009, San Francisco, California, USA.
- Series: ECS Transactions Volume 19 No.24
- Editor: Moffat, T. P. et al.
- ISBN: 9781510866379
- Pages: 115 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Aug 2018 )
Description
Members/Attendees
Tab 4
- Title: Electrochemical Processing in ULSI and MEMS 4
- Subtitle: 215th ECS Meeting
- Date/Location: Held 24-29 May 2009, San Francisco, California, USA.
- Series: ECS Transactions Volume 19 No.24
- Editor: Moffat, T. P. et al.
- ISBN: 9781510866379
- Pages: 115 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Aug 2018 )