Details
- Title: Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11
- Subtitle: 216th ECS Meeting
- Date/Location: Held 4-9 October 2009, Vienna, Austria.
- Series: ECS Transactions Volume 25 No.05
- Editor: Hattori, T. et al.
- ISBN: 9781607680925
- Pages: 393 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Aug 2017 )
Description
Members/Attendees
Tab 4
- Title: Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11
- Subtitle: 216th ECS Meeting
- Date/Location: Held 4-9 October 2009, Vienna, Austria.
- Series: ECS Transactions Volume 25 No.05
- Editor: Hattori, T. et al.
- ISBN: 9781607680925
- Pages: 393 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Aug 2017 )