Details
- Title: Semiconductor Cleaning Science and Technology 12 (SCST 12)
- Subtitle: 220th ECS Meeting
- Date/Location: Held 10-11 October 2011, Boston, Massachusetts, USA.
- Series: ECS Transactions Volume 41 No.05
- Editor: Hattori, T. et al.
- ISBN: 9781607682592
- Pages: 333 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( May 2017 )
Description
Members/Attendees
Tab 4
- Title: Semiconductor Cleaning Science and Technology 12 (SCST 12)
- Subtitle: 220th ECS Meeting
- Date/Location: Held 10-11 October 2011, Boston, Massachusetts, USA.
- Series: ECS Transactions Volume 41 No.05
- Editor: Hattori, T. et al.
- ISBN: 9781607682592
- Pages: 333 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( May 2017 )