Details
- Title: Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5
- Date/Location: Held 24-28 May 2015, Chicago, Illinois, USA.
- Series: ECS Transactions Volume 66 No.04
- Editor: Roozeboom, F. et al.
- ISBN: 9781623322373
- Pages: 326 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Aug 2016 )
Description
Members/Attendees
Tab 4
- Title: Silicon Compatible Materials, Processes, and Technologies for Advanced Integrated Circuits and Emerging Applications 5
- Date/Location: Held 24-28 May 2015, Chicago, Illinois, USA.
- Series: ECS Transactions Volume 66 No.04
- Editor: Roozeboom, F. et al.
- ISBN: 9781623322373
- Pages: 326 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Aug 2016 )