Details
- Title: Semiconductor Cleaning Science and Technology 13 (SCST 13)
- Date/Location: Held 27 October - 1 November 2013, San Francisco, California, USA.
- Series: ECS Transactions Volume 58 No.06
- Editor: Hattori, T. et al.
- ISBN: 9781607684510
- Pages: 340 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Apr 2016 )
Description
Members/Attendees
Tab 4
- Title: Semiconductor Cleaning Science and Technology 13 (SCST 13)
- Date/Location: Held 27 October - 1 November 2013, San Francisco, California, USA.
- Series: ECS Transactions Volume 58 No.06
- Editor: Hattori, T. et al.
- ISBN: 9781607684510
- Pages: 340 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Apr 2016 )