EVOLUTIONS IN PLANARIZATION: EQUIPMENT, MATERIALS, TECHNIQUES AND APPLICATIONS. (SYMPOSIUM BB AT THE 2013 MRS SPRING MEETING AND EXHIBIT)

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021724

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Title: Evolutions in Planarization: Equipment, Materials, Techniques and Applications
Subtitle: Symposium BB at the 2013 MRS Spring Meeting and Exhibit
Date/Location: Held 1-5 April 2013, San Francisco, California, USA.
Series: Materials Research Society Symposium Proceedings Volume 1560
Editor: Borst, C.
ISBN: 9781632661425
Pages: 94 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: Cambridge University Press (CUP) / Materials Research Society (MRS)
POD Publisher: Curran Associates, Inc. ( Apr 2014 )

Title: Evolutions in Planarization: Equipment, Materials, Techniques and Applications
Subtitle: Symposium BB at the 2013 MRS Spring Meeting and Exhibit
Date/Location: Held 1-5 April 2013, San Francisco, California, USA.
Series: Materials Research Society Symposium Proceedings Volume 1560
Editor: Borst, C.
ISBN: 9781632661425
Pages: 94 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: Cambridge University Press (CUP) / Materials Research Society (MRS)
POD Publisher: Curran Associates, Inc. ( Apr 2014 )