HETEROGENEOUS INTEGRATION CHALLENGES OF MEMS, SENSOR AND CMOS LSI. (SYMPOSIUM B AT THE 2012 MRS SPRING MEETING)

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017996

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Title: Heterogeneous Integration Challenges of MEMS, Sensor and CMOS LSI
Subtitle: Symposium B at the 2012 MRS Spring Meeting
Date/Location: Held 9-13 April 2012, San Francisco, California, USA.
Series: Materials Research Society Symposium Proceedings Volume 1427
Editor: Masu, K.
ISBN: 9781627482363
Pages: 105 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: Cambridge University Press (CUP) / Materials Research Society (MRS)
POD Publisher: Curran Associates, Inc. ( Jun 2013 )

Title: Heterogeneous Integration Challenges of MEMS, Sensor and CMOS LSI
Subtitle: Symposium B at the 2012 MRS Spring Meeting
Date/Location: Held 9-13 April 2012, San Francisco, California, USA.
Series: Materials Research Society Symposium Proceedings Volume 1427
Editor: Masu, K.
ISBN: 9781627482363
Pages: 105 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: Cambridge University Press (CUP) / Materials Research Society (MRS)
POD Publisher: Curran Associates, Inc. ( Jun 2013 )