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EXTREME ULTRAVIOLET LITHOGRAPHY. INTERNATIONAL SYMPOSIUM. 2012. (2 VOLS)
- Item #:
- 017163
- UPC:
Details
-
Title:
International Symposium on Extreme Ultraviolet Lithography 2012
-
Date/Location:
Held 30 September - 4 October 2012, Brussels, Belgium.
-
ISBN:
9781622768387
-
Pages:
1,049 (2 Vols)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
Sematech
-
POD Publisher:
Curran Associates, Inc. ( Apr 2013 )
-
Title:
International Symposium on Extreme Ultraviolet Lithography 2012
-
Date/Location:
Held 30 September - 4 October 2012, Brussels, Belgium.
-
ISBN:
9781622768387
-
Pages:
1,049 (2 Vols)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
Sematech
-
POD Publisher:
Curran Associates, Inc. ( Apr 2013 )