Details
- Title: Electrochemical Processing in ULSI and MEMS 3
- Subtitle: Held at the 211th ECS Meeting
- Date/Location: Held 6-11 May 2007, Chicago, Illinois.
- Series: ECS Transactions Volume 6 No.08
- Editor: Dukovic, J.
- ISBN: 9781604238846
- Pages: 276 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Jan 2008 )
Description
Members/Attendees
Tab 4
- Title: Electrochemical Processing in ULSI and MEMS 3
- Subtitle: Held at the 211th ECS Meeting
- Date/Location: Held 6-11 May 2007, Chicago, Illinois.
- Series: ECS Transactions Volume 6 No.08
- Editor: Dukovic, J.
- ISBN: 9781604238846
- Pages: 276 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Jan 2008 )