EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 5TH 2006. (4 VOLS)

EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 5TH 2006. (4 VOLS)

Item #:
000827
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Details

  • Title: 5th International (EUVL) Symposium 2006
  • Date/Location: Held 16-18 October 2006, Barcelona, Spain.
  • ISBN: 9781604237412
  • Pages: 2,300 (4 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Sematech
  • POD Publisher: Curran Associates, Inc. ( Apr 2007 )

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  • Title: 5th International (EUVL) Symposium 2006
  • Date/Location: Held 16-18 October 2006, Barcelona, Spain.
  • ISBN: 9781604237412
  • Pages: 2,300 (4 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Sematech
  • POD Publisher: Curran Associates, Inc. ( Apr 2007 )