Skip to main content
CHEMICAL-MECHANICAL PLANARIZATION. (SYMPOSIUM I AT THE 2002 MRS SPRING MEETING)
- Item #:
- 000303
- UPC:
Details
-
Title:
Chemical-Mechanical Planarization
-
Subtitle:
Symposium I at the 2002 MRS Spring Meeting
-
Date/Location:
Held 1-5 April 2002, San Francisco, California, USA.
-
Series:
Materials Research Society Symposium Proceedings Volume 732
-
ISBN:
9781558996687
-
Pages:
140 (1 Vol)
-
Format:
Softcover
-
Publisher:
Springer Nature (SNCSC)
-
POD Publisher:
Curran Associates, Inc. ( Oct 2006 )
-
Title:
Chemical-Mechanical Planarization
-
Subtitle:
Symposium I at the 2002 MRS Spring Meeting
-
Date/Location:
Held 1-5 April 2002, San Francisco, California, USA.
-
Series:
Materials Research Society Symposium Proceedings Volume 732
-
ISBN:
9781558996687
-
Pages:
140 (1 Vol)
-
Format:
Softcover
-
Publisher:
Springer Nature (SNCSC)
-
POD Publisher:
Curran Associates, Inc. ( Oct 2006 )
