EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY XII

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY XII

Item #:
058861
Our Price: $110.00
Adding to cart… The item has been added

Details

  • Title: Extreme Ultraviolet (EUV) Lithography XII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 22-26 February 2021, Online Only.
  • Series: Proceedings of SPIE Volume 11609
  • Editor: Felix, Nelson M.
  • ISBN: 9781510640511
  • Pages: 394 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2021 )

Description

 

Members/Attendees

 

Tab 4

 
  • Title: Extreme Ultraviolet (EUV) Lithography XII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 22-26 February 2021, Online Only.
  • Series: Proceedings of SPIE Volume 11609
  • Editor: Felix, Nelson M.
  • ISBN: 9781510640511
  • Pages: 394 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2021 )