OPTICS AND PHOTONICS FOR ADVANCED DIMENSIONAL METROLOGY

OPTICS AND PHOTONICS FOR ADVANCED DIMENSIONAL METROLOGY

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  • Title: Optics and Photonics for Advanced Dimensional Metrology
  • Subtitle: At SPIE Photonics Europe
  • Date/Location: Held 6-10 April 2020, Online.
  • Series: Proceedings of SPIE Volume 11352
  • Editor: de Groot, Peter J.
  • ISBN: 9781510634763
  • Pages: 420 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jun 2020 )

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  • Title: Optics and Photonics for Advanced Dimensional Metrology
  • Subtitle: At SPIE Photonics Europe
  • Date/Location: Held 6-10 April 2020, Online.
  • Series: Proceedings of SPIE Volume 11352
  • Editor: de Groot, Peter J.
  • ISBN: 9781510634763
  • Pages: 420 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jun 2020 )