DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY XII

DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY XII

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046760
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  • Title: Design-Process-Technology Co-optimization for Manufacturability XII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 28 February - 1 March 2018, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 10588
  • Editor: Cain, Jason P.
  • ISBN: 9781510616684
  • Pages: 306 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2018 )

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  • Title: Design-Process-Technology Co-optimization for Manufacturability XII
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 28 February - 1 March 2018, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 10588
  • Editor: Cain, Jason P.
  • ISBN: 9781510616684
  • Pages: 306 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2018 )