Details
- Title: 15th International Symposium on Semiconductor Cleaning Science and Technology (SCST 15)
- Subtitle: 232nd ECS Meeting
- Date/Location: Held 1-5 October 2017, National Harbor, Maryland, USA.
- Series: ECS Transactions Volume 80 No.2
- Editor: Hattori, T. et al.
- ISBN: 9781623324711
- Pages: 258 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Oct 2017 )
Description
Members/Attendees
Tab 4
- Title: 15th International Symposium on Semiconductor Cleaning Science and Technology (SCST 15)
- Subtitle: 232nd ECS Meeting
- Date/Location: Held 1-5 October 2017, National Harbor, Maryland, USA.
- Series: ECS Transactions Volume 80 No.2
- Editor: Hattori, T. et al.
- ISBN: 9781623324711
- Pages: 258 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Oct 2017 )